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CD AFM Probes

CD AFM Probes

Author: Creative Diagnostics

CD AFM Probes

The critical dimension atomic force probe is a boot-shaped probe probe used to accurately measure three-dimensional (3D) features. The probe can accurately provide highly linear measurements over a range of line widths, and is not affected by feature type, density or material type. This technology can measure undercut characteristics, and can be calibrated to a traceable standard to ensure measurement accuracy.

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